سنسورهای غیر تماسی استفاده شده برای دستکاری میکرو/نانو
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سنسورهای غیر تماسی استفاده شده برای دستکاری میکرو/نانو

عنوان فارسی مقاله: پیشرفت های اخیر در سنسورهای غیر تماسی استفاده شده برای دستکاری میکرو/نانو
عنوان انگلیسی مقاله: Recent advances in non-contact force sensors used for micro/nano manipulation
مجله/کنفرانس: سنسورها و محرک ها. A، فیزیکی - Sensors And Actuators. A, Physical
رشته های تحصیلی مرتبط: مهندسی برق
گرایش های تحصیلی مرتبط: الکترونیک، مهندسی کنترل، ابزار دقیق
کلمات کلیدی فارسی: سیستم های دستکاری میکرو/نانو، سنسورهای میکرو- force، سنسورهای فیبر نوری
کلمات کلیدی انگلیسی: Micro/nano manipulation systems، Micro-force sensors، Optical fiber sensors
نوع نگارش مقاله: مقاله مروری (Review Article)
نمایه: Scopus - Master Journals List - JCR
شناسه دیجیتال (DOI): https://doi.org/10.1016/j.sna.2019.07.007
دانشگاه: Guangdong Key Laboratory of Precision Equipment and Manufacturing Technology, South China University of Technology, Guangzhou 510640, China
ناشر: الزویر - Elsevier
نوع ارائه مقاله: ژورنال
نوع مقاله: ISI
سال انتشار مقاله: 2019
ایمپکت فاکتور: 3/098 در سال 2018
شاخص H_index: 139 در سال 2019
شاخص SJR: 0/664 در سال 2018
شناسه ISSN: 0924-4247
شاخص Quartile (چارک): Q2 در سال 2018
فرمت مقاله انگلیسی: PDF
تعداد صفحات مقاله انگلیسی: 23
وضعیت ترجمه: ترجمه نشده است
قیمت مقاله انگلیسی: رایگان
آیا این مقاله بیس است: خیر
آیا این مقاله مدل مفهومی دارد: ندارد
آیا این مقاله پرسشنامه دارد: ندارد
آیا این مقاله متغیر دارد: ندارد
کد محصول: E12745
رفرنس: دارای رفرنس در داخل متن و انتهای مقاله
فهرست انگلیسی مطالب

Abstract


1- Introduction


2- Electrical micro-force sensors


3- Optical micro-force sensors


4- Discussion


5- Conclusion


References

نمونه متن انگلیسی مقاله

Abstract


Micro/nano manipulation for both mechanical and biological structures is currently a popular research field. To protect small-scale structures and acquire their mechanical properties, a micro-scale force sensor is needed. This paper focuses on reviewing the research on non-contact micro-force sensor parts that can be integrated in this manipulation system. The content involves the structure, working principle, resolution and sensitivity of different force sensor parts, including electrical and optical force sensors. The electrical force sensors include piezoresistive, piezoelectric, capacitive, electrothermal and strain gauge-based types; while the optical force sensors focus on but are not restricted to the optical fiber-based force sensors and the vision-based sensing systems. All of these sensors are analysed and compared. Electrical force sensors are currently widely used but are restricted by the sensing properties and size; optical force sensors have high sensitivity, small structure and anti-electromagnetic-interference properties, but they are hardly applied in micro/nano manipulation systems for force measurement. As a result, optical force sensors may become the new generation of sensors that can be integrated with micro/nano manipulation systems.


Introduction


Micro/nano manipulation is a popular interdisciplinary research field of this century. This approach is common for the fabrication of three-dimensional (3D) microstructures, the movement of nanostructures, the transportation and motion control of particles and, especially applications in biology [1,2]. Based on this technology, manipulation and characterization of biological cells, such as cell transfer, isolation, immobilization and injection have been widely used in many biological applications over the past decade [3]. As the handled biological cells can be easily damaged, the capability of precisely measuring small forces at the micro/nanoscale is necessary forproviding force feedbackduringmanipulation[4]. The measurement of force can also be used for the mechanical characterization of cells since genetic mutations and pathogens can result in changes to cell mechanical properties such as elasticity and viscosity [5]. In [6], changes in the mechanical properties of mouse zona pellucida post fertilization were tested for investigating the hardening process. Other than biological cells, force measurement is essential for sample protection and mechanical properties detection of micro/nano samples. Additionally, the force sensing system is vital for the experimental verification of the micro-force theoretical model. Different kinds of micro-force sensors were designed during the past decades, including piezoresistive, piezoelectric, capacitive, and electrothermal sensors and those based on visual detection. Reference [7,8] demonstrated two kinds of triaxial piezoresistive micro-force sensors with millinewton resolution, while reference [9,10] presented two piezoresistive force sensors with the piezoresistance attached to the membranes. In [11,12], force sensors were constructed using the polyvinylidene fluoride(PVDF) sensing material by measuring the electric charge of the PVDF membrane. Beyeler et al. [13] devised a six-axial force sensor using seven capacitors with a micronewton resolution. Bulut Coskun et al. [14] designed a micro-electrothermal force that used feedback control to nullify displacements within the device with a high resolution of 7.8 nN. Rajagopalan et al. [15] put forward a displacement-based force sensor with the resolution of 50 pN. The force was obtained by optically measuring the displacement of the probe with respect to a fixed reference beam.

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